The first one is grammatically incorrect, because when we use did in a question the verb must not be in the past tense.
The second one and the third one would be appropriate choices.
If you explain about the situation more, I'll tell you the right choice between the third and second.
If someone is looking for somebody. and he said: i am lookingfor the director. and I would like to ask if this person have scheduled a meeting with the director previously, I should say: Have you scheduled a meeting? or did you schedule a meeting?